The RPJ Series relies on mature RF generation technology to provide customers with RF power supplies with greater power,higher precision, and fast response.Tool it has functions such as phase setting and pulse control.
Applicable fields:photovoltaic industry,flat panel display industry, semiconductor industry,chemical industry Industry,laboratory,scientific research,manufacturing,etc.
Applicable processes:plasma enhanced chemical vapor deposition (PECVD),plasma Sub-body etching,plasma cleaning,radio frequency ion source,plasma diffusion,Plasma polymerization sputtering,reactive sputtering,etc.