The TPM5 series power controller adopts the module design idea and integrates up to 6 circuits inside. Products are mainly used in diffusion furnaces, PECVD, epitaxy furnaces, etc.
The TPM5 series power controller adopts the module design idea and integrates up to 6 circuits inside. Products are mainly used in diffusion furnaces, PECVD, epitaxy furnaces, etc.
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